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1

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Soft X-Ray and EUV Imaging Systems - Illumination optics design for EUV lithography

Antoni, Martin, Singer, Wolfgang, Schultz, Jorg, Wangler, Johannes, Escudero-Sanz, Isabel, Kruizinga, Bob, Kaiser, Winfried M., Stulen, Richard H.

Year:

2000

Language:

english

File:

PDF, 590 KB

english, 2000

2

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Soft X-Ray and EUV Imaging Systems - DUV or EUV: that is the question

Williamson, David M., Kaiser, Winfried M., Stulen, Richard H.

Year:

2000

File:

PDF, 1017 KB

2000

3

SPIE Proceedings [SPIE Photonics West '96 - San Jose, CA (Saturday 27 January 1996)] Diffractive and Holographic Optics Technology III - Mass-producible microholographic tags

Sweatt, William C., Descour, Michael R., Ray-Chaudhuri, Avijit K., Kravitz, Stanley H., Warren, Mial E., Stulen, Richard H., Tichenor, Daniel A., Underwood, James H., Krenz, Kevin D., Cindrich, Ivan,

Year:

1996

Language:

english

File:

PDF, 563 KB

english, 1996

4

SPIE Proceedings [SPIE 26th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 25 February 2001)] Emerging Lithographic Technologies V - System integration and performance of the EUV engineering test stand

Tichenor, Daniel A., Ray-Chaudhuri, Avijit K., Replogle, William C., Stulen, Richard H., Kubiak, Glenn D., Rockett, Paul D., Klebanoff, Leonard E., Jefferson, Karen J., Leung, Alvin H., Wronosky, John

Year:

2001

Language:

english

File:

PDF, 2.06 MB

english, 2001

5

Recent developments in angle-resolved electron-stimulated desorption of ions from surfaces

Richard H. Stulen

Journal:

Progress in Surface Science

Year:

1989

Language:

english

File:

PDF, 2.28 MB

english, 1989

6

Erratum to “Hydrogen chemisorption and the structure of the diamond C(100)-(2 × 1) surface” [Surface Science 237 (1990) 35]

Glenn D. Kubiak, Michelle T. Schulberg, Richard H. Stulen

Journal:

Surface Science Letters

Year:

1992

Language:

english

File:

PDF, 68 KB

english, 1992

7

Progress in the development of extreme ultraviolet lithography exposure systems

Richard. H. Stulen

Journal:

Microelectronic Engineering

Year:

1999

Language:

english

File:

PDF, 643 KB

english, 1999

8

Extreme Ultraviolet Lithography

STULEN, RICHARD H., SWEENEY, DONALD W.

Journal:

Optics and Photonics News

Year:

1999

Language:

english

File:

PDF, 1.13 MB

english, 1999

9

Hydrogen chemisorption and the structure of the diamond C(100)-(2 × 1) surface

Alex V. Hamza, Glenn D. Kubiak, Richard H. Stulen

Journal:

Surface Science

Year:

1990

Language:

english

File:

PDF, 1.87 MB

english, 1990

10

Erratum to “Hydrogen chemisorption and the structure of the diamond C(100)-(2 × 1) surface” [Surface Science 237 (1990) 35]

Glenn D. Kubiak, Michelle T. Schulberg, Richard H. Stulen

Journal:

Surface Science

Year:

1992

Language:

english

File:

PDF, 90 KB

english, 1992

11

[Springer Series in Surface Sciences] Desorption Induced by Electronic Transitions DIET III Volume 13 || Studies of Sapphire Photoablation by Laser-Induced Fluorescence and Photothermal Deformation Measurement

Stulen, Richard H., Knotek, Michael L.

Year:

1988

Language:

english

File:

PDF, 556 KB

english, 1988

12

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Soft X-Ray and EUV Imaging Systems - Trends in optical design of projection lenses for UV and EUV lithography

Ulrich, Wilhelm, Beiersdoerfer, Susanne, Mann, Hans-Juergen, Kaiser, Winfried M., Stulen, Richard H.

Year:

2000

Language:

english

File:

PDF, 1.17 MB

english, 2000

13

Summary Abstract: Observation of molecular H2 and D2 on Pd and Ag using thermal desorption between 5 and 20 K

Stulen, Richard H.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

1988

Language:

english

File:

PDF, 456 KB

english, 1988

14

Hydrogen desorption from chemical vapor deposited diamond films

Schulberg, Michelle T., Fox, Ciaran A., Kubiak, Glenn D., Stulen, Richard H.

Journal:

Journal of Applied Physics

Year:

1995

Language:

english

File:

PDF, 1.20 MB

english, 1995

15

Measurements of weakly bound hydrogen on Pd(111) between 5 and 80 K

Stulen, Richard H.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

1987

Language:

english

File:

PDF, 621 KB

english, 1987

16

Developing a Soft X-Ray Projection Lithography Tool

Stulen, Richard H., Freeman, Richard R.

Journal:

AT&T Technical Journal

Year:

1991

Language:

english

File:

PDF, 5.21 MB

english, 1991

17

[Springer Series in Surface Sciences] Desorption Induced by Electronic Transitions DIET III Volume 13 || Long Lifetime of Bulk Luminescence Observed in Spectrosil Glasses Under Electron Bombardment

Stulen, Richard H., Knotek, Michael L.

Year:

1988

Language:

english

File:

PDF, 865 KB

english, 1988

18

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Soft X-Ray and EUV Imaging Systems - Multilayer reflectance during exposure to EUV radiation

Oestreich, Sebastian, Klein, Roman, Scholze, Frank, Jonkers, Jeroen, Louis, Eric, Yakshin, Andrey E., Goerts, Peter C., Ulm, Gerhard, Haidl, Markus, Bijkerk, Fred, Kaiser, Winfried M., Stulen, Richard

Year:

2000

Language:

english

File:

PDF, 191 KB

english, 2000

19

SPIE Proceedings [SPIE Microlithography '97 - Santa Clara, CA (Monday 10 March 1997)] Emerging Lithographic Technologies - Measurement of mid-spatial-frequency scatter in extreme ultraviolet lithography systems using direct aerial image measurements

Fields, Charles H., Ray-Chaudhuri, Avijit K., Krenz, Kevin D., Oldham, William G., Stulen, Richard H., Seeger, David E.

Year:

1997

Language:

english

File:

PDF, 515 KB

english, 1997

20

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Soft X-Ray and EUV Imaging Systems - Si-based multilayers with high thermal stability

Kaiser, Norbert, Yulin, Sergey A., Feigl, Torsten, Kaiser, Winfried M., Stulen, Richard H.

Year:

2000

Language:

english

File:

PDF, 1.94 MB

english, 2000

21

Temperature Programmed Desorption of Hydrogen and Deuterium from Cvd Diamond Samples

Schulberg, Michelle T., Kubiak, Glenn D., Stulen, Richard H.

Journal:

MRS Proceedings

Year:

1992

Language:

english

File:

PDF, 388 KB

english, 1992

22

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Soft X-Ray and EUV Imaging Systems - Optical layout of BACH: a beamline for advanced dichroism at Elettra

Zangrando, Marco, Finazzi, Marco, Parmigiani, Fulvio, Paolucci, G., Cocco, Daniele, Kaiser, Winfried M., Stulen, Richard H.

Year:

2000

Language:

english

File:

PDF, 233 KB

english, 2000

23

SPIE Proceedings [SPIE Photonics West '97 - San Jose, CA (Saturday 8 February 1997)] Micromachining and Imaging - Mass-producible microtags for security applications: Tolerance analysis by rigorous coupled-wave analysis

Descour, Michael R., Sweatt, William C., Ray-Chaudhuri, Avijit K., Krenz, Kevin D., Tichenor, Daniel A., Stulen, Richard H., Michalske, Terry A., Wendman, Mark A.

Year:

1997

Language:

english

File:

PDF, 637 KB

english, 1997

24

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Soft X-Ray and EUV Imaging Systems - Optimization of air gap for two-dimensional imaging system using synchrotron radiation

Zeniya, Tsutomu, Takeda, Tohoru, Yu, Quanwen, Hyodo, Kazuyuki, Yuasa, Tetsuya, Aiyoshi, Yuji, Hiranaka, Yukio, Itai, Yuji, Akatsuka, Takao, Kaiser, Winfried M., Stulen, Richard H.

Year:

2000

Language:

english

File:

PDF, 616 KB

english, 2000

25

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Soft X-Ray and EUV Imaging Systems - High-precision measurements of the groove density of diffraction gratings

Cocco, Daniele, Sergo, Rudi, Sostero, Giovanni, Zangrando, Marco, Kaiser, Winfried M., Stulen, Richard H.

Year:

2000

Language:

english

File:

PDF, 186 KB

english, 2000

26

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Soft X-Ray and EUV Imaging Systems - Mirror substrates for EUV lithography: progress in metrology and optical fabrication technology

Dinger, Udo, Eisert, Frank, Lasser, Holger, Mayer, Maximilian, Seifert, A., Seitz, Guenther, Stacklies, Siegfried, Stickel, Franz-Josef, Weiser, Martin, Kaiser, Winfried M., Stulen, Richard H.

Year:

2000

Language:

english

File:

PDF, 1.13 MB

english, 2000

27

SPIE Proceedings [SPIE SPIE's 1995 Symposium on Microlithography - Santa Clara, CA (Sunday 19 February 1995)] Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing V - Printability of substrate and absorber defects on extreme ultraviolet lithographic masks

Nguyen, Khanh B., Ray-Chaudhuri, Avijit K., Tichenor, Daniel A., Stulen, Richard H., Nissen, Rodney P., Berger, Kurt W., Paul, Phillip H., Tennant, Donald M., Fetter, Linus A., Windt, David L., Bjorkh

Year:

1995

Language:

english

File:

PDF, 579 KB

english, 1995

28

SPIE Proceedings [SPIE SPIE's 1994 Symposium on Microlithography - San Jose, CA (Sunday 27 February 1994)] Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IV - Development of a laboratory extreme-ultraviolet lithography tool

Tichenor, Daniel A., Kubiak, Glenn D., Malinowski, Michael E., Stulen, Richard H., Haney, Steven J., Berger, Kurt W., Nissen, Rodney P., Wilkerson, G. A., Paul, Phillip H., Birtola, S. R., Jin, P. S.,

Year:

1994

Language:

english

File:

PDF, 1008 KB

english, 1994

29

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Soft X-Ray and EUV Imaging Systems - Design, fabrication, and characterization of broadband multilayer mirrors for EUV optics at normal incidence

Wang, Zhanshan, Kun, Changjun, Ma, Yueying, Chen, Bin, Cao, Jianlin, Zhou, Zhuying, Chen, Xingdan, Michette, Alan G., Kaiser, Winfried M., Stulen, Richard H.

Year:

2000

Language:

english

File:

PDF, 333 KB

english, 2000

30

SPIE Proceedings [SPIE SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation - San Diego, CA (Sunday 11 July 1993)] Applications of Laser Plasma Radiation - Application of laser plasma sources in soft x-ray projection lithography

Tichenor, Daniel A., Kubiak, Glenn D., Malinowski, Michael E., Stulen, Richard H., Haney, Steven J., Berger, Kurt W., Nissen, Rodney P., Schmitt, Randal L., Wilkerson, G. A., Jin, P. S., Sweatt, Willi

Year:

1994

Language:

english

File:

PDF, 321 KB

english, 1994

31

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Soft X-Ray and EUV Imaging Systems - Present status of the ASET at-wavelength phase-shifting point diffraction interferometer

Sugisaki, Katsumi, Zhu, Yucong, Gomei, Yoshio, Niibe, Masahito, Watanabe, Takeo, Kinoshita, Hiroo, Kaiser, Winfried M., Stulen, Richard H.

Year:

2000

Language:

english

File:

PDF, 247 KB

english, 2000

32

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Soft X-Ray and EUV Imaging Systems II - Initial results from the EUV engineering test stand

Tichenor, Daniel A., Ray-Chaudhuri, Avijit K., Lee, Sang Hun, Chapman, Henry N., Replogle, William C., Berger, Kurt W., Stulen, Richard H., Kubiak, Glenn D., Klebanoff, Leonard E., Wronosky, John B.,

Year:

2001

Language:

english

File:

PDF, 1.44 MB

english, 2001

33

SPIE Proceedings [SPIE SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation - San Diego, CA (Sunday 9 July 1995)] Optical Manufacturing and Testing - Development of compact extreme ultraviolet interferometry for on-line testing of lithography cameras

Ray-Chaudhuri, Avijit K., Nissen, Rodney P., Krenz, Kevin D., Stulen, Richard H., Sweatt, William C., Warren, Mial E., Wendt, Joel R., Kravitz, Stanley H., Bjorkholm, John E., Doherty, Victor J., Stah

Year:

1995

Language:

english

File:

PDF, 277 KB

english, 1995

34

SPIE Proceedings [SPIE SPIE's 1995 Symposium on Microlithography - Santa Clara, CA (Sunday 19 February 1995)] Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing V - Recent results in the development of an integrated EUVL laboratory tool

Tichenor, Daniel A., Kubiak, Glenn D., Haney, Steven J., Nissen, Rodney P., Berger, Kurt W., Arling, Richard W., Ray-Chaudhuri, Avijit K., Nguyen, Khanh B., Stulen, Richard H., Wronosky, John B., Jord

Year:

1995

Language:

english

File:

PDF, 979 KB

english, 1995

35

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Soft X-Ray and EUV Imaging Systems - Portable diagnostics for EUV light sources

Stuik, R., Constantinescu, Raluca C., Hegeman, Petra, Jonkers, Jeroen, Fledderus, H. F., Banine, Vadim, Bijkerk, Fred, Kaiser, Winfried M., Stulen, Richard H.

Year:

2000

Language:

english

File:

PDF, 552 KB

english, 2000

36

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Soft X-Ray and EUV Imaging Systems - Laser-generated water plasma source for extreme-ultraviolet lithography and at-wavelength interferometry

Constantinescu, Raluca C., Jonkers, Jeroen, Hegeman, Petra, Visser, Matthieu, Kaiser, Winfried M., Stulen, Richard H.

Year:

2000

Language:

english

File:

PDF, 588 KB

english, 2000

37

SPIE Proceedings [SPIE SPIE's 1996 International Symposium on Microlithography - Santa Clara, CA (Sunday 10 March 1996)] Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI - Characterization of the alignment system on a laboratory extreme ltraviolet lithography tool

Nguyen, Khanh B., Tichenor, Daniel A., Berger, Kurt W., Ray-Chaudhuri, Avijit K., Haney, Steven J., Nissen, Rodney P., Perras, Yon E., Arling, Richard W., Stulen, Richard H., Fetter, Linus A., Tennant

Year:

1996

Language:

english

File:

PDF, 563 KB

english, 1996

38

SPIE Proceedings [SPIE SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation - San Diego, CA (Sunday 9 July 1995)] Applications of Laser Plasma Radiation II - Extreme ultraviolet lithography for circuit fabrication at 0.1-μm feature size

Tichenor, Daniel A., Kubiak, Glenn D., Stulen, Richard H., Richardson, Martin C., Kyrala, George A.

Year:

1995

Language:

english

File:

PDF, 687 KB

english, 1995

39

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Soft X-Ray and EUV Imaging Systems - Compact debris shutter design of a laser-produced plasma source for high-NA application

Yamamoto, Masaki, Furudate, Minaji, Sato, Norio, Takagi, Hirochi, Kaiser, Winfried M., Stulen, Richard H.

Year:

2000

Language:

english

File:

PDF, 72 KB

english, 2000

40

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Soft X-Ray and EUV Imaging Systems - High-resolution soft x-ray microscopy

Chao, Weilun, Anderson, Erik H., Denbeaux, Gregory, Harteneck, Bruce D., LeGros, Mark A., Pearson, Angelic L., Olynick, Deirdre L., Attwood, Jr., David T., Kaiser, Winfried M., Stulen, Richard H.

Year:

2000

Language:

english

File:

PDF, 394 KB

english, 2000

41

Current Status of the EUV Engineering Test Stand.

Leung, Alvin H., Tichenor, Daniel A., Replogle, William C., Goldsmith, John E. M., Kubiak, Glenn D., Stulen, Richard H., Ballard, William P., Jefferson, Karen L., Klebanoff, Leonard E., O'Connell, Don

Journal:

Journal of Photopolymer Science and Technology

Year:

2002

Language:

english

File:

PDF, 2.31 MB

english, 2002